Drainage structure in polishing plant

摘要

Disclosed is a polishing plant comprising a polishing apparatus (30) having a top ring (35) for holding a workpiece and a turn table (33) for polishing a surface of the workpiece held by the top ring (35); and a cleaning apparatus (50) having cleaning machines (57,59) for cleaning the workpiece polished by the polishing apparatus (30), wherein at least one drainage pipe (10) connected to the polishing apparatus (30) to discharge a waste liquid (W1) from the polishing apparatus (30) and at least one drainage pipe (12) connected to the cleaning apparatus (50) to discharge a waste liquid (W2) from the cleaning apparatus (50) are divided into a plurality of drainage pipe lines, depending on the type of waste liquid. By use of the polishing plant of the present invention, a waste liquid treatment can be efficiently conducted.