| 摘要 |
PROBLEM TO BE SOLVED: To prevent the separation miss and mark damage, to speed up carriage, and to facilitate standard transfer in the case of the carriage of semiconductor device. SOLUTION: A detection sensor detects that a semiconductor device A at the frontmost end of a carrier 1 continuously belt-conveyed in one line state is carried at the carriage outlet in the downstream end in the carrier direction. Next, the semiconductor device A at the frontmost end is suction-held by a suction nozzle 16 according to the detection signal of the detection sensor. At this time, an endless belt 7 is plunged into a relief trench 17 by the plunge force so as to lower the belt carrier surface on this position that than on the other position. After reversing the following semiconductor by reversing the endless belt 7 in this state on the upstream side on the carriage direction, the semiconductor device A at the frontmost end is carried out of the carriage outlet 14. In such a constitution, the aperture dimension of the outlet 14 in the carriage direction of the carriage outlet 14 is specified to be longer than the length dimension of the carriage direction of one semiconductor device but shorter than that of two semiconductor devices A. |
