CONTROL INFORMATION SETTING METHOD AND INFORMATION DISPLAYING METHOD FOR PROCESS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method which can easily set control information and also can easily display necessary information on a screen. SOLUTION: After control information to be set is inputted and shown on a screen of display DP provided on a controller CC, memory M of the controller CC stores control information that is shown on the display screen by showing the file name of a registration destination by selecting a start icon shown on the display screen and selecting a register icon 12 shown in a dialog to a cluster controller CC which integrates and controls several modules PM(process module), TM(transport module), CM(cassette module) and DM(docking module) which constitute a process device. Also, an index icon 4 that corresponds to a file is shown by selecting a display icon 13 shown in the dialog, and corresponding file information stored in the memory M is shown on the display screen with the screen switched by selecting the index icon.