发明名称 NONVOLATILE SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURE THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To improve the rewrite resistance, without lowering the write efficiency. SOLUTION: On a main surface 2a of a semiconductor substrate 2 high-concn. impurity regions 3a, 3b are formed to define channel forming regions 2b. Low- concn. impurity regions 4a are formed beneath the high-concn. impurity regions 3a to be drains. The regions 3a located at the channel forming regions 2b have side ends extending to these regions 2b more than those of the low-impurity regions 4a located at the regions 2b. P<+> impurity regions 5 are formed to surround the impurity regions 3a, 4a.</p>
申请公布号 JPH10125808(A) 申请公布日期 1998.05.15
申请号 JP19960274815 申请日期 1996.10.17
申请人 MITSUBISHI ELECTRIC CORP 发明人 SAKAKIBARA KIYOHIKO
分类号 G11C16/04;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824 主分类号 G11C16/04
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