| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a detecting method in which a formation irregularity can be inspected easily and sufficiently over a macro wide range. SOLUTION: A slit pattern 4 which is formed to be the same shape as a required pattern shape is overlapped with a formed pattern 2 which is formed to be the required pattern shape, light 5 which is passed through the slit pattern 4 is transmitted through the formed pattern 2 which is formed to be the required pattern shape, and a defect in the formed pattern 2 can be detected easily. Thereby, the formed pattern 2 to be inspected is irradiated with the light which is passed from the slit pattern 4 which is formed to be the same as the formed pattern, regions outside the formed pattern 2 to be inspected are not irradiated with the light, and a formation irregularity in the formed pattern can be revealed clearly over a macro wide range.</p> |
