| 摘要 |
PROBLEM TO BE SOLVED: To put a wafer into/from a cassette having a cover without disturbing the down-flow of the clean air in a cassette station. SOLUTION: A passage 33a is formed in a part of a partition member which separates a sub-arm mechanism from a cassette placing table 20 so as to face the opening of a cassette CR. A cassette transfer mechanism 82 which brings the opening of the cassette CR on the cassette placing table 20 close to/away from the passage 33a is provided. On the other hand, a cover removing mechanism 47 which moves a cassette cover 44 vertically while it holds the cassette cover 44 is provided beneath the passage 33a. By operating the cassette transform mechanism 82 and the cover removing mechanism synchronously, the cover 44 is attached and detached and the detached cover 44 is housed under the passage 33a. |
