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发明名称
WAFER FLATNESS MEASURING MECHANISM
摘要
申请公布号
JPH10125755(A)
申请公布日期
1998.05.15
申请号
JP19960298045
申请日期
1996.10.22
申请人
HITACHI ELECTRON ENG CO LTD
发明人
ISHIMORI HIDEO;TOKUTOMI TERUAKI;SHIZAWA NORITAKE
分类号
G01B21/30;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01B21/30
代理机构
代理人
主权项
地址
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