| 摘要 |
PROBLEM TO BE SOLVED: To reduce the influence of the change in the external environment upon the temperature control of medium and control the temperature of the medium with the high precision and at a low cost. SOLUTION: Coolant which is medium in a tank 14 and whose pressure is elevated by a pump 16 is circulated through a circulation route 10. The temperature of the coolant is detected by a thermosensor 20. A temperature controller 22 regulates the temperature of the coolant by the heat exchange in the low temperature side 18L of a temperature regulator 18 in accordance with the detection result, and controls the temperature of the coolant to be a predetermined temperature. The coolant whose temperature is regulated is transferred to a buffer tank 40. The coolant is temporarily stored in the buffer tank 40 to reduce the temperature fluctuation. The coolant with the smoothed temperature is supplied to a cooling object 12 which is an object whose temperature is to be regulated, for instance, to an aligner, and a projection optical system, etc., can be cooled with the high precision. |
