| 摘要 |
PROBLEM TO BE SOLVED: To reduce crosstalk by providing a coupling prevention layer between a charge collecting electrode and an overlapping data line thereby setting a capacitive coupling lower than a specified level between them. SOLUTION: A capacitive coupling 28 of capacitance CX is present between a charge collecting electrode 12 and a data line 20. Since each cell 10 is sufficiently small, CT (total capacitance of the charge collecting electrode 12 except CX) becomes very small and a serious crosstalk problem is presented when the CX is more essential even if overlap is not present. The crosstalk problem can be lessened by some degree through an additional storage capacitor but the process is complicated, the yield is decreased and the reading rate is deteriorated. When a coupling prevention layer 30 is provided between the electrode 12 and the data line 20, capacitive coupling due to the CX is reduced below a threshold level for allowing crosstalk. For example, capacitive coupling can be reduced lower than 2% by means of the coupling prevention layer 30.
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