| 摘要 |
PROBLEM TO BE SOLVED: To enhance a main discharge electrode replacing operation in workability. SOLUTION: A main discharge electrode is equipped with a pedestal 21 which is fitted to a laser chamber through the intermediary of an insulator 9, and connected to a feed terminal 8 through which a high-voltage current is fed from a discharge power supply, an electrode 22 fitted to the pedestal 21 in a detachable manner, and a positioning means which positions the electrode 22 relatively to the pedestal 21. A gas sealing member 15 may be provided to a joint surface between the insulator 9 and the pedestal 21 so as to seal in laser gas. A butt section 23 between the edge face of the pedestal 21 and that of the electrode 22 or a knock pin is made to serve as the above positioning means. |
