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发明名称
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10126001(A)
申请公布日期
1998.05.15
申请号
JP19960277623
申请日期
1996.10.21
申请人
MITSUBISHI ELECTRIC CORP
发明人
NISHIMURA TAKASHI
分类号
H01L21/306;H01S5/00;(IPC1-7):H01S3/18
主分类号
H01L21/306
代理机构
代理人
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