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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10125661(A)
申请公布日期
1998.05.15
申请号
JP19970236357
申请日期
1997.09.01
申请人
SEIKO EPSON CORP
发明人
MINAMIMOMOSE ISAMU
分类号
H01L21/302;H01L21/027;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
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