| 摘要 |
PROBLEM TO BE SOLVED: To detect a gas accurately. SOLUTION: A sensor has a piezoelectric film 3 and a substrate 1 for supporting the piezoelectric film 3, and a pair of electrodes SE for excitation for generating a surface acoustic wave by exciting the piezoelectric film 3 and a pair of electrodes RE for detecting the above surface acoustic wave are formed in a state in contact with the piezoelectric film 3. In this case, a high-propagation layer HS that is formed by a material with a higher propagation speed than that of the surface acoustic wave in the piezoelectric film 3 is provided on the substrate 1 side instead of the piezoelectric film 3. |
