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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH10125915(A)
申请公布日期
1998.05.15
申请号
JP19960282318
申请日期
1996.10.24
申请人
NEC YAMAGATA LTD
发明人
YAMAZAKI SATOSHI
分类号
H01L21/28;H01L21/336;H01L21/8238;H01L27/092;H01L29/78;(IPC1-7):H01L29/78;H01L21/823
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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