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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH10125604(A)
申请公布日期
1998.05.15
申请号
JP19960276771
申请日期
1996.10.21
申请人
SONY CORP
发明人
YAMAMOTO SUNAO
分类号
C30B25/08;C23C16/44;C30B35/00;H01L21/02;H01L21/205;(IPC1-7):H01L21/205
主分类号
C30B25/08
代理机构
代理人
主权项
地址
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