发明名称 METHOD FOR FORMING A THROUGH-VIA IN A LAMINATED SUBSTRATE
摘要 A method of forming a through-via (62) in a laminated substrate (60) by applying a polymeric photoabsorptive layer (68) on an exposed bottom surface of a laminated substrate. A through-via is laser drilled in the substrate through the substrate to a bottom of the substrate. The photoabsorptive layer (68) formed on the bottom surface of the substrate is then removed.
申请公布号 WO9820531(A2) 申请公布日期 1998.05.14
申请号 WO1997US18974 申请日期 1997.10.22
申请人 W.L. GORE & ASSOCIATES, INC. 发明人 NODDIN, DAVID, B.
分类号 H01L21/48;H01L23/12;H01L23/538;H05K3/00;H05K3/42;H05K3/46 主分类号 H01L21/48
代理机构 代理人
主权项
地址