发明名称 |
METHOD FOR FORMING A THROUGH-VIA IN A LAMINATED SUBSTRATE |
摘要 |
A method of forming a through-via (62) in a laminated substrate (60) by applying a polymeric photoabsorptive layer (68) on an exposed bottom surface of a laminated substrate. A through-via is laser drilled in the substrate through the substrate to a bottom of the substrate. The photoabsorptive layer (68) formed on the bottom surface of the substrate is then removed. |
申请公布号 |
WO9820531(A2) |
申请公布日期 |
1998.05.14 |
申请号 |
WO1997US18974 |
申请日期 |
1997.10.22 |
申请人 |
W.L. GORE & ASSOCIATES, INC. |
发明人 |
NODDIN, DAVID, B. |
分类号 |
H01L21/48;H01L23/12;H01L23/538;H05K3/00;H05K3/42;H05K3/46 |
主分类号 |
H01L21/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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