METHOD OF PRODUCING ULTRA HIGH PURITY MONOSILANE AND APPARATUS THEREFOR

摘要

PCT No. PCT/EP95/01084 Sec. 371 Date Dec. 27, 1995 Sec. 102(e) Date Dec. 27, 1995 PCT Filed Mar. 22, 1995 PCT Pub. No. WO95/26927 PCT Pub. Date Oct. 12, 1995A method and unit for easily and continuously producing high pressure gaseous monosilane and high pressure liquid monosilane, each having an ultra high purity. In the ultra high purity monosilane producing method, a feed monosilane gas is pressurized, cooled down and subjected to a gas-liquid phase separation. The separated gas phase is introduced to a lower rectification column 1 so as to be rectified. The gas obtained through this rectification is introduced to an upper rectification column 2 so as to be rectified, wherein a gaseous monosilane product or liquid monosilane product having an ultra high purity is taken out of the bottom portion of the upper rectification column.