| 发明名称 |
PIEZOELEKTRISCHE KRISTALLINE FILME |
| 摘要 |
<p>Piezoelectric crystalline films on substrate, which consist essentially of a crystalline zinc oxide film with a c-axis perpendicular to a substrate surface, containing 0.01 to 20.0 atomic percent of at least one element selected from the group consisting of iron, chromium, cobalt and nickel.</p> |
| 申请公布号 |
DE2811044(A1) |
申请公布日期 |
1978.09.28 |
| 申请号 |
DE19782811044 |
申请日期 |
1978.03.14 |
| 申请人 |
MURATA MANUFACTURING CO.,LTD. |
发明人 |
OGAWA,TOSHIO;MASHIO,TASUKU;NISHIYAMA,HIROSHI |
| 分类号 |
H01L41/18;(IPC1-7):H01L41/18;C04B35/00 |
主分类号 |
H01L41/18 |
| 代理机构 |
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代理人 |
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