| 摘要 |
In a radiant heating apparatus, at least an outer radiant heating unit and an inner radiant heating unit located inside the outer radiant heating unit are disposed. A peripheral portion of an article to be treated is mainly heated by the outer radiant heating unit, while a central portion of the article is mainly heated by the internal radiant heating unit. A partition wall is disposed between the outer and inner radiant heating units. Radiation light emitted by each radiant heating unit is reflected by the partition wall so that the radiation light is separated from that emitted by the other radiant heating unit, whereby an area is defined in which the article is heated by each radiant heating unit. Accordingly, a larger article, particularly a substrate-shaped article, can be heated uniformly. <IMAGE> |
