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发明名称
PROCESS AND DEVICE FOR ION THINNING IN A HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPE
摘要
申请公布号
EP0840940(A1)
申请公布日期
1998.05.13
申请号
EP19960930950
申请日期
1996.07.24
申请人
NMI NATURWISSENSCHAFTLICHES UND MEDIZINISCHES INSTITUT AN DER UNIVERSITAET TUEBINGEN IN REUTLINGEN
发明人
NISCH, WILFRIED;GNAUCK, PETER
分类号
G01N1/28;G01N1/32;H01J37/26;H01J37/30;H01J37/305;(IPC1-7):H01J37/26
主分类号
G01N1/28
代理机构
代理人
主权项
地址
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