MANUFACTURE OF POLYCRYSTAL THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a polycrystal thin film by which the divergent angle of an ion beam generated from an ion source is controlled and the crystal orientation control effect is improved. SOLUTION: The manufacturing method for the polycrystal thin film is executed by forming the polycrystal thin film on a base material 22 by depositing constituting particles, which are a target provided within an evacuatable film formation processing vessel while the base material is irradiated with the ion beam generated from the ion source 39 at an angle of incidence of 50 to 60 deg. to a normal H on the film formation surface of the base material 22 when the constituting particles are beated out by sputtering and are deposited on the base material 22. In such a case, the divergent angleΔθof the ion beam calculated by the equation:Δθ<=2tan<-1> (d/2L) is controlled by changing a beam bore (d) of the ion source 39 and the transporting distance (the distance between the beam port 49 and the base material 22) L of the ion beam.