| 摘要 |
<p>PROBLEM TO BE SOLVED: To safely and completely deodorize the inside of a cleaning area while using ozone. SOLUTION: Air pressurized and dehumidified by a compressor 1 having a dryer 2 is alternately sent to adsorption tanks 4A and 4B so that high-purity oxygen can be generated. This oxygen is sent to an ozone generator 9 and ozone is generated. This ozone and diluted air from a branch pipe 10 are mixed by a static mixer 15, diluted ozone is prepared and this is stored in a chamber 16. Opening/closing valves 34, 35, 36 and 37 are successively opened one by one and the diluted ozone in the chamber 16 is discharged from a discharge nozzle 31 to respective cleaning areas 32. The concentration of ozone is always monitored by an ozone concentration gauge 17 and an ozone concentration detector 33.</p> |
