发明名称 System and method for depositing coating of modulated composition
摘要 Apparatus and method are provided for forming coatings of transition metal compounds on solid bodies using cathodic arcs and a reactive gas in a vacuum chamber. The metal composition of the coatings is varied by moving the articles to be coated through the vacuum chamber having cathodes at selected locations, the articles being supported on movable supports.
申请公布号 US5750207(A) 申请公布日期 1998.05.12
申请号 US19950390542 申请日期 1995.02.17
申请人 SI DIAMOND TECHNOLOGY, INC. 发明人 HAMMOND, MARK S.;MCCLAIN, TIMOTHY W.
分类号 C23C14/00;C23C14/02;C23C14/32;C23C14/50;H01J37/32;H05H1/24;(IPC1-7):H05H1/24 主分类号 C23C14/00
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