Multilayered soft magnetic film and magnetic head using the same

摘要

A multilayered soft magnetic film including a substrate, and a cyclic structure formed on the substrate and comprised of a main magnetic film composed of either Fe or an alloy containing the same as a main component thereof and a base film composed of either Ni-Fe alloy or an alloy containing the same as a main component thereof which are stacked alternately and repeatedly. The main magnetic film is 500 nm thick or thinner per film, while the base film is 20 nm thick or thinner per film. A thickness ratio of the main magnetic film to the base film per film is 1 or larger. The multilayered soft magnetic film exhibits good soft magnetic properties form the very beginning while maintaining a high initial permeability even after subjected to a heat treatment at a high temperature.