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发明名称
Herstellungsverfahren für mikromechanische Elemente
摘要
申请公布号
DE69222701(T2)
申请公布日期
1998.05.07
申请号
DE19926022701T
申请日期
1992.07.01
申请人
XEROX CORP., ROCHESTER, N.Y., US
发明人
BOL, IGOR I., SHERMAN OAKS, CALIFORNIA 91403, US
分类号
C23F17/00;B23P11/00;B23P15/00;F16C33/14;G03F7/00;(IPC1-7):G03F7/00
主分类号
C23F17/00
代理机构
代理人
主权项
地址
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