发明名称 SUBSTRATE-TREATING DEVICE
摘要 The invention concerns a device for treating substrates (5) in a fluid container containing a treatment fluid, said device comprising at least one holder arrangement (1) for the substrates (5) and/or at least one substrate carrier (4). According to the invention, more reliable and more rapid removal and drying of the treatment fluid is attained if the holder arrangement (1) comprises a fluid-suction device.
申请公布号 WO9819328(A1) 申请公布日期 1998.05.07
申请号 WO1997EP05054 申请日期 1997.09.16
申请人 STEAG MICROTECH GMBH;FINGERHOLZ, AURELIA;SCHOENLEBER, DIETMAR 发明人 FINGERHOLZ, AURELIA;SCHOENLEBER, DIETMAR
分类号 B08B3/04;H01L21/00;H01L21/304;(IPC1-7):H01L21/00 主分类号 B08B3/04
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