发明名称 |
SUBSTRATE-TREATING DEVICE |
摘要 |
The invention concerns a device for treating substrates (5) in a fluid container containing a treatment fluid, said device comprising at least one holder arrangement (1) for the substrates (5) and/or at least one substrate carrier (4). According to the invention, more reliable and more rapid removal and drying of the treatment fluid is attained if the holder arrangement (1) comprises a fluid-suction device.
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申请公布号 |
WO9819328(A1) |
申请公布日期 |
1998.05.07 |
申请号 |
WO1997EP05054 |
申请日期 |
1997.09.16 |
申请人 |
STEAG MICROTECH GMBH;FINGERHOLZ, AURELIA;SCHOENLEBER, DIETMAR |
发明人 |
FINGERHOLZ, AURELIA;SCHOENLEBER, DIETMAR |
分类号 |
B08B3/04;H01L21/00;H01L21/304;(IPC1-7):H01L21/00 |
主分类号 |
B08B3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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