发明名称 |
Vorrichtung zum Behandeln von Substraten |
摘要 |
The invention concerns a device for treating substrates (4) in a fluid container (1) containing a treatment fluid, the device having at least one substrate-holder arrangement (3) and a lifting arrangement (8) for lowering and raising the substrate-holder arrangement (3). In order to prevent the lifting arrangement (8) or its structural and operating elements from being damaged or destroyed by chemical vapours, a vapour-suction arrangement is provided which draws off vapours in the region of the lifting arrangement (8), preferably above the surface of the treatment fluid.
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申请公布号 |
DE19645425(A1) |
申请公布日期 |
1998.05.07 |
申请号 |
DE1996145425 |
申请日期 |
1996.11.04 |
申请人 |
STEAG MICROTECH GMBH, 72124 PLIEZHAUSEN, DE |
发明人 |
WEBER, MARTIN, 72124 PLIEZHAUSEN, DE |
分类号 |
B08B3/04;B65G49/02;C23G3/00;H01L21/00;H01L21/304;H01L21/677;(IPC1-7):H01L21/302;B65G49/04;C23G5/04;C23F1/00 |
主分类号 |
B08B3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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