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发明名称
摘要
申请公布号
JP2748530(B2)
申请公布日期
1998.05.06
申请号
JP19890094120
申请日期
1989.04.13
申请人
SEIKOO EPUSON KK
发明人
MURAKAMI HIROAKI
分类号
H01L21/60;H01L21/321;(IPC1-7):H01L21/321
主分类号
H01L21/60
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代理人
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