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发明名称
摘要
申请公布号
JP2747158(B2)
申请公布日期
1998.05.06
申请号
JP19920052103
申请日期
1992.03.11
申请人
YAMAGUCHI NIPPON DENKI KK
发明人
MAGOTA MASASHI
分类号
H01L21/66;H01L23/50;(IPC1-7):H01L23/50
主分类号
H01L21/66
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