| 摘要 |
PROBLEM TO BE SOLVED: To realize improvement in throughput by adjusting a focal positioning method in accordance with the exposure time. SOLUTION: The relation between a transient characteristic 30, indicating the relation between a time from the start of driving of a Z-stage until a focusing position is reached and the position of a photosensitive substrate in the direction of optical axis, and the depth of focus which enables exposure of a predetermined line width is stored. An exposure time T necessary for one shot is allocated to a time (T-T1 ) until the photosensitive substrate enters the depth of focus from outside thereof and a time T1 after the photosensitive substrate enters the depth of focus, on the basis of the depth of focus (b±μ) and the transient characteristic 30. Exposure is started at a time (t1 ) when the photosensitive substrate is outside of the depth of focus. |
