| 摘要 |
PROBLEM TO BE SOLVED: To obtain an inspection method in which a flaw existing on a face to be inspected is detected surely. SOLUTION: A flaw 1 to be inspected is moved in such a way that its part A to be imaged is moved with the passage of time, an image from an imaging means 2 is input in every arbitrary time, a flaw candidate point B is extracted from two input images whose imaging time is different from each other, and an error range is set around the flaw candidate point B in an image which is imaged later. Then, the flaw candidate point B in the image which is imaged before is moved according to the movement distance of the face, to be inspected, on the imaging means. A flaw candidate point which is close to the moved flaw candidate point B out of flaw candidate points existing inside the error range is used as a matching candidate point, the above processing operation is performed to a plurality of images which are imaged in a time-series manner, and the flaw candidate point B which is nominated as the matching candidate point is decided as a flaw existing on the face 1 to be inspected. |
