A complementary electrostatic driving apparatus for a micro-actuator

摘要

An electrostatic driving apparatus for a microactuator is provided in which to prevent an excitation signal from being mixed with a sensing signal via the parasitic path formed of parasitic capacitance according to the structure of the microactuator and vibration characteristics thereof, which cause noise, signals having opposite polarities are applied to activating vibration plates (21a,21b) using an inverter (27) such that the activating vibration signals of each plate, which cause noise, are offset, thereby improving the signal-to-noise ratio. <IMAGE>