| 摘要 |
PURPOSE:To evaluate the film quality of a wiring metal film by putting a standard electrode and an electrode working as a tested sample in a strong acid etching solution wherein the electric potential generated by the electrodes is detected by a potentiostud. CONSTITUTION:With an aluminum standard electrode 4 and an aluminum measuring sample 5 immersed in an aqueous strong acid solution 2, etching is started. At that time, a natural electrode potential is generated between a platinum electrode 3 and the sample 5 and the potential is recorded by a recorder 9 through a potentiometer 7. Furthermore, a natural electrode potential is simultaneously generated between the electrode 4 and the sample 5 and the potential is recorded by a recorder 10 through a potentiometer 8. The above potentials vary by etching process. Therefore, measured samples can be tested by checking the values by the recorders 9, 10. |
