| 摘要 |
PROBLEM TO BE SOLVED: To reduce the manufacturing cost of trays and to make it unnecessary to adjust trays or a tray chucking mechanism when trays are chucked by the tray chucking mechanism. SOLUTION: A contact surface which makes contact with edges 7 of trays 5 inside respective chuck claws 1 is formed to a tapered surface 8. Thereby, since the contact point between the edge 7 of the tray 5 and the tapered surface 8 is guided along the tapered surface when the tray 5 is chucked, even if the thicknesses of the respective trays are fluctuated each other, as long as the height position of the respective trays 5 is so held as to be able to contact with any position of the tapered surface 8 of the respective chuck claw 1, the tray 5 can be smoothly chucked. |
