| 摘要 |
PROBLEM TO BE SOLVED: To prevent impurity front caught by an adsorbent contained in a reaction container from migrating by maintaining an operation to cool part of the adsorbent with a refined low temperature fluid in the state of a liquid during part of a stop stage time separating a refining cycle N and an ensuing refining cycle N+1. SOLUTION: Prior to the start of a refining cycle, the parts, heated in downtime, of the device, i.e., a upstream conduit 8, a downstream conduit 9 and filter sets 4a, 4b are precooled after purge. Next, a liquid nitrogen is sent into a reaction container 2 from a supply source 1 through the upstream conduit 8 and is refined in the reaction container 2 by a process to adsorb the impurities of the liquid nitrogen with the help of an adsorbent 11. In this case, the adsorbent 11 is kept cooled across the entire interruption time of the device separating a refining cycle N from an ensuing refining cycle N+1, between these cycles N, N+1.
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