发明名称 PHOTOELECTRIC SENSOR AND WAFER DETECTING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To improve the light receiving rate of reflecting light on an object to be detected and enhance the accuracy of detection to detect the presence or absence thereof by providing a light projection part for emitting a light to the object to be detected as well as a light receiving part for entering a light reflecting thereon and outputting an electrical signal according to the amount of entered light thereafter. SOLUTION: A photoelectric sensor 10 is provided with a first sensor part 11 consisting of a first light projection part 11A and a first light receiving part 11B and a second sensor part 12 consisting of a second light projection part 12A and a second light receiving part 12B. In the first sensor part 11, when a reflecting surface 13a of an object 13 to be detected is at normal position, a light from the first light projection part 11A is reflected on the reflecting surface 13a and it is received by the first light receiving part 11B. In the same manner that the first sensor part 11, in the second sensor part 12, when the reflecting surface 13a of the object 13 to be detected is at normal position, a light from the second light projection part 12A is also reflected on the reflecting surface 13a and it is received by the light receiving part 12B. Thus, since the combination of the light projection parts 11A and 12A and the light receiving parts 11B and 12B can be made appropriately, the lihgt receiving rate of reflection light can be improved, resulting in improved accuracy of detection.</p>
申请公布号 JPH10116878(A) 申请公布日期 1998.05.06
申请号 JP19960267608 申请日期 1996.10.08
申请人 MECS:KK 发明人 KATO KATSUHIKO;OKADA HIKARI
分类号 G01V8/20;G01J1/02;H01L21/67;H01L21/68;(IPC1-7):H01L21/68 主分类号 G01V8/20
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