| 摘要 |
<p>PROBLEM TO BE SOLVED: To monitor the temperature of a substrate without necessitating a special constitution other than a heater in a substrate holder and to easily perform real-time monitoring of the temperature distribution of the substrate. SOLUTION: In a substrate holder 21 holding a substrate 20 by surface contact, a heater 22, which is composed of a plurality of heating blocks 221 and 222 and of resisting heating system, is provided. A monitoring means 23 which monitors the temperature of the heater 22 is composed of current voltage detectors 231 and 232 and a computing element 233 to obtain the resistance value of the heater 22 and calculate the temperature of the heater 22. The temperature distribution of the substrate 20 is monitored based on the temperature data of heating blocks 221 and 222.</p> |
