| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent dust such as particles, etc., from being adhered to a wafer by rotating in normal/reverse directions such a plurality of fixing mechanisms form the outside of a case that are integrated with a cassette on the outer circumference of a rotary body, brought into contact with the outer circumference of the wafer at a plurality of points, and used to fix the wafer on the respective supporting members. SOLUTION: An entrance for wafer W for evaluation is provided on the front of a case 1, and an open/close door 1A is attached thereto. A plurality of supporting posts 4 are erected around a center shaft 3 erected at the center of the lower surface 1B within the case 1. The posts 4 are fitted loose with loose-fitting holes 5A corresponding to the respective posts 4 of a rotary body 5, and the body 5 is rotated in normal/reverse directions in the specified range. Fixing mechanisms 6, which the brought into contact with the outer circumference of the wafer W and fixes them, are fitted in accordance with corners of the case 1, on the outer circumference of the body 5, and the respective mechanisms 6 are rotated integrally together with the body 5. The body 5 and mechanisms 6 are rotated in normal/reverse directions in a range of circular hole 5B through a guide pin 6E.</p> |
