发明名称 RETICLE CASE, RETICLE STOCKER, TRANSFER SYSTEM AND TRANSFERRING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a reticle case which may be used for reticles of different sizes. SOLUTION: A reticle case has first supporting members 22a, 23c for supporting a first reticle R1, and second supporting members 22b, 23a for supporting a second reticle R2 of a size different from that of the first reticle R1. The first supporting members 22a, 23c and the second supporting members 22b, 23a are arranged at a predetermined distance from each other in the direction of thickness of the first reticle R1 supported by the first supporting members 22a, 23c.</p>
申请公布号 JPH10116785(A) 申请公布日期 1998.05.06
申请号 JP19970314742 申请日期 1997.11.17
申请人 NIKON CORP 发明人 NISHI TAKECHIKA;KAKIZAKI YUKIO;IWATA HIROMITSU
分类号 G03F1/66;G03F7/20;H01L21/027;(IPC1-7):H01L21/027;G03F1/14 主分类号 G03F1/66
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