发明名称 MAGNETIC ELEMENT AND ITS MANUFACTURING METHOD AND ITS MANUFACTURING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To readily manufacture a magnetic element of good magnetic characteristics, by a method wherein a portion thinner than a film in a center portion of the magnetic element is provided, and magnetic characteristics showing an abrupt magnetization reversion by magnetic hysteresis, are provided. SOLUTION: A metal wire rod serving as a spacer 9 is placed on a substrate 4, and a mask material 10 provided with a circular open part 13 is placed thereon, and they are piled up and wound on a cylindrical can. Particles 14 being a thin film are deposited to penetrate into the slit under the mask material 10 near the circular open part 13. For this reason, the thin film 2 is deposited on a substrate 4 in the wider range than a diameter of the circular open part 13, and a film thickness becomes thinner near an outer peripheral part of the obtained thin film 2 as approaching the end, and magnetic characteristics showing an abrupt magnetization reversion by magnetic hysteresis are obtained. Accordingly, it is opposable to readily manufacture a magnetic element 1 of uncontiunuous magnetization response characteristics.</p>
申请公布号 JPH10116715(A) 申请公布日期 1998.05.06
申请号 JP19960272071 申请日期 1996.10.15
申请人 UNITIKA LTD 发明人 FURUKAWA SHINJI;YANO NOBUYOSHI;FREUD B HUMPHREY
分类号 G01V1/40;C23C14/06;G01R33/02;H01F1/03;H01F1/18;H01F41/34;(IPC1-7):H01F1/18 主分类号 G01V1/40
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