| 摘要 |
<p>PROBLEM TO BE SOLVED: To facilitate taking in/out of a wafer and to prevent rocking of the wafer in a groove, by providing a plurality of pressing mechanisms comprising a plurality of electric tongue pieces which press a plurality of points of wafer periphery parts, where a plurality of grooves provided, to one wall of the groove, so that all wafers are fixed at the same time. SOLUTION: A wafer carrier is provided with a plurality of pressing mechanisms 1 wherein at least two points of the periphery part of a wafer 9, where a plurality of grooves 3 are provided, are press to one side of the groove part 3 with an elastic tongue piece 5 so that all wafers 9 are fixed at the same time. At a movable rod 4 constituting the pressing mechanism 1, elastic leaf-like tongue pieces 5 are attached, corresponding to the groove 3, with the same interval. The tongue piece 5 of the movable rod 4 are so attached that a part of the outside periphery of the plurality of wafers 9 are moved at the same time in pressed-direction. As a point fixing the wafer 9 with the pressing mechanism 1, two points facing each other on the line passing the center of the wafer 9 are preferable.</p> |
