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发明名称
摘要
申请公布号
JP2748213(B2)
申请公布日期
1998.05.06
申请号
JP19930121595
申请日期
1993.05.24
申请人
NIPPON REEZA DENSHI KK
发明人
YONEDA KATSUMI;TAJIMA HARUO;TANAKA AKIRA
分类号
C23C14/32;C23C14/24;H01J37/32;(IPC1-7):C23C14/24
主分类号
C23C14/32
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