发明名称 |
Method and apparatus for providing a purified resource |
摘要 |
A method and apparatus provides a resource capable of affecting the manufacture of a product to a bay and a chase. Clean resource is supplied to the bay where it is used to affect the manufacture of a product in one or more steps highly sensitive to contaminants in the resource. The resource contaminated by the manufacture of the product is then sent to a chase where it is further used to affect the manufacture of the same or a different product in steps that are less sensitive to the contamination of the resource. Because the bay is most sensitive to contaminants in the resource, the impurified resource received at the chase may not adversely affect the manufacture of products in the chase and thus, supplying a clean resource to the chase is unnecessary. |
申请公布号 |
AU4591497(A) |
申请公布日期 |
1998.05.05 |
申请号 |
AU19970045914 |
申请日期 |
1997.09.30 |
申请人 |
CH2MHILL INDUSTRIAL DESIGN CORPORATION |
发明人 |
MICHAEL O'HALLORAN;WILMAR KOHNE;STEPHEN NELSON |
分类号 |
F24F7/06;F24F3/16;H01L21/02 |
主分类号 |
F24F7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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