Process for producing, by etching and/or electroplating, annular zones in narrow holes

摘要

The invention relates to a process for producing, by etching and/or electroplating, annular zones in narrow holes. In order to produce breaks in the metallisation on the inner walls of holes in workpieces, which breaks are short in relation to the depth of the hole, or in order to generate narrow conductive annular zones on the shell face of holes, the holes are filled with a resist, e.g. photoresist and the workpiece is then immersed, at a defined reduced pressure (negative pressure) in a stripping medium which dissolves the resist. The liquid penetrates until it is stopped by the remaining air volume. In addition to the evacuation, the exposure time in the stripper is likewise important for the remaining resist ring width.