发明名称 |
Vibratory microgyroscope |
摘要 |
A microgyroscope includes a substrate, a vibratory structure having two stripe portions, a plurality of connection portions, and a comb, an elastic member for elastically maintaining the vibratory structure, a driver for applying the vibratory structure, a sensor for sensing the one directional action of the vibratory structure, and a plurality of sensing electrodes for sensing displacement by Coriolis force.
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申请公布号 |
US5747690(A) |
申请公布日期 |
1998.05.05 |
申请号 |
US19960773990 |
申请日期 |
1996.12.26 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD.;KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
PARK, KYU-YEON;LEE, CHONG-WON;CHO, YOUNG-HO;SONG, CI-MOO |
分类号 |
G01P3/44;G01C19/00;G01C19/56;G01P9/04;(IPC1-7):G01P9/00 |
主分类号 |
G01P3/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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