发明名称 Selective etch for ii-vi semiconductors
摘要 A II-VI semiconductor device is fabricated using a selective etchant in the form of aqueous solution of HX where X is Cl or Br. The II-VI semiconductor device is composed of a number of layers. Selective etching can be enabled by introducing Mg into one of the semiconductor layers. The resultant device may include a semiconductor layer containing Mg.
申请公布号 AU4802097(A) 申请公布日期 1998.05.05
申请号 AU19970048020 申请日期 1997.09.26
申请人 MINNESOTA MINING AND MANUFACTURING COMPANY 发明人 MICHAEL A HAASE;PAUL F. BAUDE;THOMAS J. MILLER
分类号 H01S5/32;H01L21/465;H01S5/20;H01S5/223;H01S5/327;H01S5/347 主分类号 H01S5/32
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