发明名称 |
Trap for collecting solid |
摘要 |
A trap for collecting solid is connected to either an exhaust port or a suction port of a vacuum pump for trapping a solid material separated from a sublimed gas discharged by the vacuum pump. The trap includes a casing, a passage defining member disposed in the casing and defining a gas passage in the casing, and an intermediate member disposed between the casing and the passage defining member. The intermediate member is made of a flat thin sheet which is formed into a tubular member, and the tubular member is capable of being spread when taken out from the casing.
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申请公布号 |
US5746790(A) |
申请公布日期 |
1998.05.05 |
申请号 |
US19960696228 |
申请日期 |
1996.08.13 |
申请人 |
EBARA CORPORATION |
发明人 |
NIIMURA, YASUHIRO;IKEGAMI, TETSUMA;HANAFUSA, NAOYA;NAKANIWA, MASARU |
分类号 |
B01D45/16;(IPC1-7):B01D45/16;B01D45/18 |
主分类号 |
B01D45/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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