发明名称 |
Activated air showering system for clean room and method for controlling the same |
摘要 |
An activated air showering system for a clean room includes a plurality of shower disks provided on a floor of the clean room, where each of the disks is formed with a plurality of exhaust holes for exhausting particles released from a worker. A sensing device senses the presence of the worker on the shower disk and a driving device drives the shower disk in response to a signal from the sensing device. Air sprayers emit air when the shower disk is driven by the driving device to remove foreign particles from the worker.
|
申请公布号 |
US5746652(A) |
申请公布日期 |
1998.05.05 |
申请号 |
US19960771775 |
申请日期 |
1996.12.20 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, JOUNG-SUN;KIM, DAE-YUL;AN, YO-HAN;JUN, JAE-KANG |
分类号 |
H01L21/02;B08B5/02;B08B15/02;F24F3/16;F24F7/007;F24F7/06;(IPC1-7):B01L1/04 |
主分类号 |
H01L21/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|