发明名称 Activated air showering system for clean room and method for controlling the same
摘要 An activated air showering system for a clean room includes a plurality of shower disks provided on a floor of the clean room, where each of the disks is formed with a plurality of exhaust holes for exhausting particles released from a worker. A sensing device senses the presence of the worker on the shower disk and a driving device drives the shower disk in response to a signal from the sensing device. Air sprayers emit air when the shower disk is driven by the driving device to remove foreign particles from the worker.
申请公布号 US5746652(A) 申请公布日期 1998.05.05
申请号 US19960771775 申请日期 1996.12.20
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, JOUNG-SUN;KIM, DAE-YUL;AN, YO-HAN;JUN, JAE-KANG
分类号 H01L21/02;B08B5/02;B08B15/02;F24F3/16;F24F7/007;F24F7/06;(IPC1-7):B01L1/04 主分类号 H01L21/02
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