| 摘要 |
A thin film layer (30) of primarily platinum is deposited onto a ceramic substrate (20) and electrical connections are applied to the platinum layer to form a heater. In a preferred embodiment, the electrical connections include two electrically conductive posts (60) fixed to the ceramic substrate (20) at a first end and electrically connecting the platinum heater layer (30) near this first end. Preferably, the heater layer (30) forms mounds at each post (60) and a thinner region (35) therebetween, resulting in a resistance profile which concentrates heating in the thinner region (35) and reduces undesired heating of the post area. Such heaters can be employed individually or in conjunction with other similar heaters. |
