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发明名称
DRY-ETCHING DEVICE AND ITS CONTROL METHOD
摘要
申请公布号
JPH10116817(A)
申请公布日期
1998.05.06
申请号
JP19960267430
申请日期
1996.10.08
申请人
KAWASAKI STEEL CORP
发明人
SUZUKI YASUTSUGU
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
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地址
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